JPH0410976B2 - - Google Patents

Info

Publication number
JPH0410976B2
JPH0410976B2 JP59143376A JP14337684A JPH0410976B2 JP H0410976 B2 JPH0410976 B2 JP H0410976B2 JP 59143376 A JP59143376 A JP 59143376A JP 14337684 A JP14337684 A JP 14337684A JP H0410976 B2 JPH0410976 B2 JP H0410976B2
Authority
JP
Japan
Prior art keywords
scanning
measuring
reference mark
scale
graduation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59143376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6039501A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS6039501A publication Critical patent/JPS6039501A/ja
Publication of JPH0410976B2 publication Critical patent/JPH0410976B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP59143376A 1983-07-16 1984-07-12 測定装置 Granted JPS6039501A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3325803.1 1983-07-16
DE3325803A DE3325803C2 (de) 1983-07-16 1983-07-16 Inkrementale, lichtelektrische Meßeinrichtung

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP3085131A Division JPH0749971B2 (ja) 1983-07-16 1991-04-17 測定装置
JP3085130A Division JPH0749970B2 (ja) 1983-07-16 1991-04-17 測定装置

Publications (2)

Publication Number Publication Date
JPS6039501A JPS6039501A (ja) 1985-03-01
JPH0410976B2 true JPH0410976B2 (en]) 1992-02-27

Family

ID=6204228

Family Applications (3)

Application Number Title Priority Date Filing Date
JP59143376A Granted JPS6039501A (ja) 1983-07-16 1984-07-12 測定装置
JP3085130A Expired - Lifetime JPH0749970B2 (ja) 1983-07-16 1991-04-17 測定装置
JP3085131A Expired - Lifetime JPH0749971B2 (ja) 1983-07-16 1991-04-17 測定装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP3085130A Expired - Lifetime JPH0749970B2 (ja) 1983-07-16 1991-04-17 測定装置
JP3085131A Expired - Lifetime JPH0749971B2 (ja) 1983-07-16 1991-04-17 測定装置

Country Status (5)

Country Link
US (1) US4606642A (en])
EP (1) EP0137099B1 (en])
JP (3) JPS6039501A (en])
AT (1) ATE29295T1 (en])
DE (2) DE3325803C2 (en])

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1185455B (it) * 1985-10-16 1987-11-12 Pirelli Cavi Spa Sensore ottico di posizione
DE3617254A1 (de) * 1986-05-22 1987-11-26 Heidenhain Gmbh Dr Johannes Messeinrichtung
DE3621236A1 (de) * 1986-06-25 1988-01-14 Heidenhain Gmbh Dr Johannes Laengen- oder winkelmesseinrichtung
US4912322A (en) * 1986-08-15 1990-03-27 Mitutoyo Mfg. Co., Ltd. Optical type displacement detecting device
DE3726678C1 (de) * 1987-08-11 1989-03-09 Heidenhain Gmbh Dr Johannes Inkrementale Laengen- oder Winkelmesseinrichtung
JPH01173828A (ja) * 1987-12-28 1989-07-10 Mitsutoyo Corp 光学式変位検出器
US4943716A (en) * 1988-01-22 1990-07-24 Mitutoyo Corporation Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
JPH0647638Y2 (ja) * 1988-03-05 1994-12-07 豊田工機株式会社 工作物反転搬送装置
US4993165A (en) * 1989-07-31 1991-02-19 Outboard Marine Corporation Method and apparatus for determining necessary shim thickness for a marine propulsion device pinion and bearing carrier assembly
JPH03101420U (en]) * 1990-02-01 1991-10-23
DE4111873C2 (de) * 1991-04-11 1995-05-11 Boehringer Werkzeugmaschinen Meßeinrichtung an einer Werkzeugmaschine zum Bestimmen des jeweiligen Standorts eines beweglichen Bauteils
ATE108274T1 (de) * 1991-05-18 1994-07-15 Heidenhain Gmbh Dr Johannes Interferentielle positionsmessvorrichtung.
US5199096A (en) * 1991-10-30 1993-03-30 Krishnaswamy Kathiresan Steam-resistant cable such as steam-resistant optical fiber cable
AT404300B (de) * 1992-02-20 1998-10-27 Rsf Elektronik Gmbh Drehgeber
JPH05340767A (ja) * 1993-01-20 1993-12-21 Mitsutoyo Corp 光学式変位検出器
DE19652562C2 (de) * 1996-12-17 1999-07-22 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JPH10258339A (ja) * 1997-03-18 1998-09-29 Mitsubishi Heavy Ind Ltd 双ドラム式連続鋳造方法
EP1028309B1 (de) 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE19962278A1 (de) 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JP3557584B2 (ja) * 2000-09-08 2004-08-25 双葉電子工業株式会社 リニヤスケールにおける計測信号生成回路
DE10329374A1 (de) * 2003-06-30 2005-01-20 Dr. Johannes Heidenhain Gmbh Abtastbaueinheit einer Positionsmesseinrichtung
EP1569497A1 (en) * 2004-02-25 2005-08-31 Harman Becker Automotive Systems GmbH Motional feedback loudspeaker
JP4953589B2 (ja) * 2005-05-25 2012-06-13 株式会社ミツトヨ エンコーダの原点信号生成方法及び装置
DE102006024579B4 (de) * 2006-05-18 2016-09-29 Dr. Johannes Heidenhain Gmbh Vorrichtung zur Bestimmung der Position eines entlang mindestens einer Verschieberichtung bewegbaren Objektes

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3276010A (en) * 1963-07-30 1966-09-27 Baldwin Electronics Inc Method and means for correcting output indications of an encoder
DE1548874A1 (de) * 1966-12-10 1970-10-01 Wenczler & Heidenhain Fotoelektrische Einrichtung zur Lagebestimmung eines Objektes
GB1370307A (en) * 1970-10-23 1974-10-16 Bendix Corp Apparatus for and method of determinging displacements using moire fringes
DE2511350A1 (de) * 1974-03-15 1975-10-09 Nat Research Dev Corp London Vorrichtung zum messen der verschiebung eines ersten elementes bezueglich eines zweiten
DE2952106C2 (de) * 1979-12-22 1982-11-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische inkrementale Längen- oder Winkelmeßeinrichtung
DE3037810C2 (de) * 1980-10-07 1982-11-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementale Längen- oder Winkelmeßeinrichtung
JPS57157118A (en) * 1981-03-24 1982-09-28 Mitsutoyo Mfg Co Ltd Photoelectric type displacement detecting device

Also Published As

Publication number Publication date
JPH0749971B2 (ja) 1995-05-31
JPS6039501A (ja) 1985-03-01
US4606642A (en) 1986-08-19
ATE29295T1 (de) 1987-09-15
EP0137099A1 (de) 1985-04-17
DE3465776D1 (en) 1987-10-08
JPH0749970B2 (ja) 1995-05-31
JPH0658779A (ja) 1994-03-04
EP0137099B1 (de) 1987-09-02
DE3325803C2 (de) 1986-11-20
DE3325803A1 (de) 1985-01-31
JPH06258102A (ja) 1994-09-16

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